发明授权
US06835623B2 NMOS ESD protection device with thin silicide and methods for making same
有权
具有薄硅化物的NMOS ESD保护器件及其制造方法
- 专利标题: NMOS ESD protection device with thin silicide and methods for making same
- 专利标题(中): 具有薄硅化物的NMOS ESD保护器件及其制造方法
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申请号: US10374333申请日: 2003-02-24
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公开(公告)号: US06835623B2公开(公告)日: 2004-12-28
- 发明人: Wei-Tsun Shiau , Craig T. Salling , Jerry Che-Jen Hu
- 申请人: Wei-Tsun Shiau , Craig T. Salling , Jerry Che-Jen Hu
- 主分类号: H01L218232
- IPC分类号: H01L218232
摘要:
An NMOS ESD clamping device and methods for making the same are disclosed in which the device includes N type drain and source regions formed in a semiconductor substrate and a gate overlying a P-type channel region in the substrate between the source and drain regions. A first silicide region is formed in the drain and/or the source region with a first thickness. A second thin silicide region is formed in the substrate between the gate and the drain having a second thickness less than the first thickness, wherein the thin silicide increases the ESD current clamping capability of the device to provide improved ESD circuit protection.
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