Invention Grant
- Patent Title: Electrostatic corrector
- Patent Title (中): 静电校正器
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Application No.: US10466744Application Date: 2003-07-18
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Publication No.: US06836372B2Publication Date: 2004-12-28
- Inventor: Harald Rose , Stephan Uhlemann , Christoph Weissbäcker
- Applicant: Harald Rose , Stephan Uhlemann , Christoph Weissbäcker
- Priority: DE10102527 20010120
- Main IPC: G02B1100
- IPC: G02B1100

Abstract:
An electrostatic corrector with a rectilinear optical axis has two corrective parts, which are arranged one behind the other along the optical axis and which have respective quadrupole fields and superimposed circular lens fields. The astigmatic intermediate image of one cross-section that is created by an axis point lies in one corrective part and the astigmatic intermediate image of the other cross-section, which is perpendicular to the first cross-section, lies in the other corrective part. An object of the invention is to eliminate the chromatic aberration of particle lenses. To achieve this, an electrostatic corrector is used, which includes two corrector units having similar instrumental construction, with each of the two corrector units having input and output sides on which two additional electrostatic quadrupoles are located. The two corrector units represent the axial paths in a telescopic manner in a 1:1 representation. The two corrector units are arranged one behind the other along the optical axia and are rotated by 90° about the optical axis relative to one another.
Public/Granted literature
- US20040051985A1 Electrostatic corrector Public/Granted day:2004-03-18
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