发明授权
US06840843B2 Method for manufacturing a polishing pad having a compressed translucent region 有权
一种具有压缩半透明区域的抛光垫的制造方法

Method for manufacturing a polishing pad having a compressed translucent region
摘要:
A method for producing a polishing pad comprising (a) providing a porous polymer structure, (b) compressing at least a region of the porous polymer structure to provide a translucent region, and (c) forming a polishing pad comprising the porous polymer structure, whereby a polishing pad is produced comprising the translucent region. Also provided is a polishing pad produced according to this method, and a polishing pad comprising a region that is at least translucent, wherein the translucent region is porous, as well as a method of polishing a substrate using a pad of the invention.
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