发明授权
US06840843B2 Method for manufacturing a polishing pad having a compressed translucent region
有权
一种具有压缩半透明区域的抛光垫的制造方法
- 专利标题: Method for manufacturing a polishing pad having a compressed translucent region
- 专利标题(中): 一种具有压缩半透明区域的抛光垫的制造方法
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申请号: US10083985申请日: 2002-02-27
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公开(公告)号: US06840843B2公开(公告)日: 2005-01-11
- 发明人: Jeremy Jones , Roland K. Sevilla
- 申请人: Jeremy Jones , Roland K. Sevilla
- 申请人地址: US IL Aurora
- 专利权人: Cabot Microelectronics Corporation
- 当前专利权人: Cabot Microelectronics Corporation
- 当前专利权人地址: US IL Aurora
- 主分类号: B24B37/013
- IPC分类号: B24B37/013 ; B24B37/20 ; B24D7/12 ; B29C43/00 ; B24B1/00
摘要:
A method for producing a polishing pad comprising (a) providing a porous polymer structure, (b) compressing at least a region of the porous polymer structure to provide a translucent region, and (c) forming a polishing pad comprising the porous polymer structure, whereby a polishing pad is produced comprising the translucent region. Also provided is a polishing pad produced according to this method, and a polishing pad comprising a region that is at least translucent, wherein the translucent region is porous, as well as a method of polishing a substrate using a pad of the invention.
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