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US06841079B2 Fluorochemical treatment for silicon articles 有权
硅制品的氟化学处理

Fluorochemical treatment for silicon articles
摘要:
Silicon substrates having Si—H bonds are chemically modified using a fluorinated olefin having the formula: wherein m is an integer greater than or equal to 1; n is an integer greater than or equal to 0; Z is a divalent linking group; and Rf is a highly fluorinated organic group.
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