发明授权
US06847457B2 Interferometer using integrated imaging array and high-density phase-shifting array 有权
干涉仪采用集成成​​像阵列和高密度移相阵列

Interferometer using integrated imaging array and high-density phase-shifting array
摘要:
An integrated imaging element for an interferometer generates at least one interference image that includes multiple interference portions with different relative phase shifts interleaved in a pattern having a high spatial frequency in the image. The interleaved pattern is at least partially determined by the pattern of a high density relative retarder array used in the integrated imaging element. In various embodiments, the multiple interference portions are interleaved in a checkerboard-like pattern across the entire surface of a detector device. As a result, various non-common mode errors present in various interferometers that generate separate non-interleaved images for each relative phase are reduced or eliminated.
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