发明授权
US06847457B2 Interferometer using integrated imaging array and high-density phase-shifting array
有权
干涉仪采用集成成像阵列和高密度移相阵列
- 专利标题: Interferometer using integrated imaging array and high-density phase-shifting array
- 专利标题(中): 干涉仪采用集成成像阵列和高密度移相阵列
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申请号: US10282110申请日: 2002-10-29
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公开(公告)号: US06847457B2公开(公告)日: 2005-01-25
- 发明人: Joseph D. Tobiason , Kim W. Atherton
- 申请人: Joseph D. Tobiason , Kim W. Atherton
- 申请人地址: JP Kawasaki
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JP Kawasaki
- 代理机构: Oliff & Berridge, PLC
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
An integrated imaging element for an interferometer generates at least one interference image that includes multiple interference portions with different relative phase shifts interleaved in a pattern having a high spatial frequency in the image. The interleaved pattern is at least partially determined by the pattern of a high density relative retarder array used in the integrated imaging element. In various embodiments, the multiple interference portions are interleaved in a checkerboard-like pattern across the entire surface of a detector device. As a result, various non-common mode errors present in various interferometers that generate separate non-interleaved images for each relative phase are reduced or eliminated.
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