发明授权
- 专利标题: Hybrid microlens array
- 专利标题(中): 混合微透镜阵列
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申请号: US09672159申请日: 2000-09-27
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公开(公告)号: US06847491B1公开(公告)日: 2005-01-25
- 发明人: Benjamin Bin Jian , Michael H. Leary
- 申请人: Benjamin Bin Jian , Michael H. Leary
- 申请人地址: US CA Santa Clara
- 专利权人: Arrayed Fiberoptics Corporation
- 当前专利权人: Arrayed Fiberoptics Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: JOI Patent
- 代理商 Joshua D. Isenberg
- 主分类号: G02B3/00
- IPC分类号: G02B3/00 ; G02B6/42 ; G02B11/00 ; G02B6/32 ; G02B6/36 ; G02B27/10
摘要:
The disclosed hybrid microlens enables the economical production of large diameter, high numerical aperture refractive microlens by microfabrication. The hybrid microlens has a combination of a refractive microlens formed on a thin layer of high index material such as silicon and a spacer layer of a low index material such as fused silica. Advantages include substantially reduced lens sag, fast etching of the microlens, small wafer stack thickness, large diffraction angle in the low index spacer, large optical beam diameter, high optical performance, and low cost.Also disclosed is a design for substantially reduced optical return signal and small polarization dependent optical loss from an optical fiber which is perpendicular to and butt-coupled to a planar optical surface. This design is to form a small slanted surface on the planar optical surface in the vicinity of the optical fiber core and fill the space between the fiber and the slanted surface with an index-matching optical epoxy.
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