Invention Grant
- Patent Title: Method of patterning a magnetic memory cell bottom electrode before magnetic stack deposition
- Patent Title (中): 在磁堆叠沉积之前图案化磁存储单元底电极的方法
-
Application No.: US10600920Application Date: 2003-06-20
-
Publication No.: US06849465B2Publication Date: 2005-02-01
- Inventor: Chanro Park , Gill Yong Lee
- Applicant: Chanro Park , Gill Yong Lee
- Applicant Address: DE Munich
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Munich
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01F10/00
- IPC: H01F10/00 ; H01L21/00 ; H01L21/3213 ; H01L27/22 ; H01L43/12

Abstract:
A method of patterning a bottom electrode for a magnetic memory cell. The bottom electrode is patterned prior to the deposition of the soft layer of the magnetic tunnel junction (MTJ) material stack, preventing the formation of fencing on the sidewalls of the soft layer, which can cause shorts to subsequently formed conductive lines of the magnetic memory device. A sacrificial mask is used to pattern the bottom electrode material, and at least a portion of the sacrificial mask is consumed or removed during the patterning of the bottom electrode material. The soft layer is then deposited and patterned using a hard mask.
Public/Granted literature
- US20040259274A1 METHOD OF PATTERNING A MAGNETIC MEMORY CELL BOTTOM ELECTRODE BEFORE MAGNETIC STACK DEPOSITION Public/Granted day:2004-12-23
Information query
IPC分类:
H | 电学 |
H01 | 基本电气元件 |
H01F | 磁体;电感;变压器;磁性材料的选择 |
H01F10/00 | 磁性薄膜,如单畴结构的 |