发明授权
US06859278B1 Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems
有权
多AOI系统，用于在椭偏仪，偏振计和反射计系统中方便地改变入射角
- 专利标题： Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems
- 专利标题（中）： 多AOI系统，用于在椭偏仪，偏振计和反射计系统中方便地改变入射角
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申请号： US10050802申请日： 2002-01-15
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公开(公告)号： US06859278B1公开(公告)日： 2005-02-22
- 发明人: Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
- 申请人： Blaine D. Johs , Ping He , Martin M. Liphardt , Christopher A. Goeden , John A. Woollam , James D. Welch
- 申请人地址： US NE Lincoln
- 专利权人： J.A. Woollam Co. Inc.
- 当前专利权人： J.A. Woollam Co. Inc.
- 当前专利权人地址： US NE Lincoln
- 代理商 James D. Welch
- 主分类号： G01N21/21
- IPC分类号： G01N21/21
摘要：
Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system, and to regression based methodology for evaluating and compensating the effects of the presence of electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.