发明授权
- 专利标题: Method for manufacturing liquid ejecting head
- 专利标题(中): 液体喷头的制造方法
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申请号: US10023665申请日: 2001-12-21
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公开(公告)号: US06863834B2公开(公告)日: 2005-03-08
- 发明人: Tomoyuki Hiroki , Masahiko Ogawa , Ichiro Saito , Yoshiyuki Imanaka , Muga Mochizuki
- 申请人: Tomoyuki Hiroki , Masahiko Ogawa , Ichiro Saito , Yoshiyuki Imanaka , Muga Mochizuki
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2000-389712 20001222
- 主分类号: B41J2/05
- IPC分类号: B41J2/05 ; B41J2/14 ; B41J2/16 ; G01D15/00 ; G11B5/127 ; H01L21/00
摘要:
A method for manufacturing a liquid ejecting head, in which liquid flow paths are defined by combining an element substrate with a nozzle member, comprises a step for preparing a material common to the element substrate as a base material of the nozzle member, a step for forming etching mask layers on first and second surfaces of the base material of the nozzle member, a step for forming a recessed portion in the second surface of the base material by patterning the mask layer on the second surface and effecting etching via the mask layer of the second surface, and a step for forming the nozzle grooves in the base material and communicating the recessed portion with the nozzle grooves by patterning the mask layer on the first surface of the base material and effecting etching via the mask layers of the first and second surfaces.
公开/授权文献
- US20020084245A1 Method for manufacturing liquid injecting head 公开/授权日:2002-07-04
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