发明授权
- 专利标题: Laser chemical fabrication of nanostructures
- 专利标题(中): 激光化学制造纳米结构
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申请号: US10271549申请日: 2002-10-17
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公开(公告)号: US06864190B2公开(公告)日: 2005-03-08
- 发明人: Yujie Han , Suwas Nikumb , Ben Li Luan , John Nagata
- 申请人: Yujie Han , Suwas Nikumb , Ben Li Luan , John Nagata
- 申请人地址: CA Ottawa
- 专利权人: National Research Council of Canada
- 当前专利权人: National Research Council of Canada
- 当前专利权人地址: CA Ottawa
- 代理机构: Anissimoff & Associates
- 主分类号: B23K26/362
- IPC分类号: B23K26/362 ; H01L21/31
摘要:
Disclosed is a process for fabricating luminescent porous material, the process comprising pre-treating a substrate (e.g. crystalline silicon) with laser radiation (e.g from a Nd:YAG laser) in a predetermined pattern followed by exposing the irradiated substrate to a chemical stain etchant (e.g. HF:HNO3:H2O) to produce a luminescent nanoporous material. Luminescent porous material having a luminescence maximum greater than about 2100 meV may be produced by this method. Such nanoporous materials are useful in optoelectronic and other semiconductor devices.
公开/授权文献
- US20040076813A1 Laser chemical fabrication of nanostructures 公开/授权日:2004-04-22