发明授权
- 专利标题： Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale
- 专利标题（中）： 具有亚纳米级控制分级化学成分的多组分合金薄膜的生长
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申请号： US10256324申请日： 2002-09-27
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公开(公告)号： US06867149B2公开(公告)日： 2005-03-15
- 发明人: Sasa Bajt , Stephen P. Vernon
- 申请人： Sasa Bajt , Stephen P. Vernon
- 申请人地址： US CA Santa Clara
- 专利权人： EUV Limited Liability Corporation
- 当前专利权人： EUV Limited Liability Corporation
- 当前专利权人地址： US CA Santa Clara
- 代理商 John P. Wooldridge; Alan H. Thompson
- 主分类号： C23C14/34
- IPC分类号： C23C14/34 ; C23C14/54 ; H01L21/31
摘要：
The chemical composition of thin films is modulated during their growth. A computer code has been developed to design specific processes for producing a desired chemical composition for various deposition geometries. Good agreement between theoretical and experimental results was achieved.
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