发明授权
- 专利标题: Capacitive micro-electro-mechanical switch and method of manufacturing the same
- 专利标题(中): 电容式微机电开关及其制造方法
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申请号: US10329390申请日: 2002-12-27
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公开(公告)号: US06867467B2公开(公告)日: 2005-03-15
- 发明人: Woo Seok Yang , Sung Weon Kang , Yun Tae Kim , Sung Hae Jung
- 申请人: Woo Seok Yang , Sung Weon Kang , Yun Tae Kim , Sung Hae Jung
- 申请人地址: KR Daejon-Shi
- 专利权人: Electronics and Telecommunication Research Institute
- 当前专利权人: Electronics and Telecommunication Research Institute
- 当前专利权人地址: KR Daejon-Shi
- 代理机构: Mayer, Brown, Rowe & Maw LLP
- 优先权: KR10-2002-0060107 20021002
- 主分类号: H01H59/00
- IPC分类号: H01H59/00 ; H01P1/12 ; H01L29/82
摘要:
The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.
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