发明授权
US06870950B2 Method for detecting defects in a material and a system for accomplishing the same
有权
用于检测材料中的缺陷的方法和用于实现其的系统
- 专利标题： Method for detecting defects in a material and a system for accomplishing the same
- 专利标题（中）： 用于检测材料中的缺陷的方法和用于实现其的系统
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申请号： US09809379申请日： 2001-03-15
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公开(公告)号： US06870950B2公开(公告)日： 2005-03-22
- 发明人: Erik C. Houge , Catherine Vartuli , Mike Antonell , Pam Cavanagh , Hui Ma
- 申请人： Erik C. Houge , Catherine Vartuli , Mike Antonell , Pam Cavanagh , Hui Ma
- 申请人地址： US PA Allentown
- 专利权人： Agere Systems Inc.
- 当前专利权人： Agere Systems Inc.
- 当前专利权人地址： US PA Allentown
- 主分类号： G01N21/95
- IPC分类号： G01N21/95 ; G06K9/00
摘要：
The present invention provides a method for detecting defects in a material and a system for accomplishing the same. The method includes obtaining an image of at least a portion of a material's surface and converting the image into an intensity profile. The method further includes determining a defect in the material's surface from the intensity profile. In one exemplary embodiment, the image is an electron image obtained using a scanning electron microscope. The method may further be used to determine a defect density in the material's surface.
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