- 专利标题： Method for determining depression/protrusion of sample and charged particle beam apparatus therefor
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申请号： US10192692申请日： 2002-07-11
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公开(公告)号： US06872943B2公开(公告)日： 2005-03-29
- 发明人: Atsushi Takane , Satoru Yamaguchi , Osamu Komuro , Yasuhiko Ozawa , Hideo Todokoro
- 申请人： Atsushi Takane , Satoru Yamaguchi , Osamu Komuro , Yasuhiko Ozawa , Hideo Todokoro
- 申请人地址： JP Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Dickstein Shapiro Morin & Oshinsky LLP
- 优先权： JP2001-211533 20010712; JP2002-166447 20020607
- 主分类号： G01B15/04
- IPC分类号： G01B15/04 ; G01B15/08 ; H01J37/28 ; H01L21/66 ; G01K1/08 ; G01N23/00
摘要：
A method for determining a depression/protrusion, especially of a line and space pattern formed on a sample, and an apparatus therefor. A charged particle beam is scanned with its direction being inclined to the original optical axis of the charged particle beam or a sample stage is inclined, broadening of a detected signal in a line scanning direction of the charged particle beam is measured, the broadening is compared with that when the charged particle beam is scanned with its direction being parallel to the original optical axis of the charged particle beam, and a depression/protrusion of the scanned portion is determined on the basis of increase/decrease of the broadening.
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