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US06880933B2 Method and apparatus for measuring wavefront aberrations 有权
用于测量波前像差的方法和装置

Method and apparatus for measuring wavefront aberrations
摘要:
An apparatus and method for measuring wavefront aberrations. The apparatus comprises a reflecting device for reflecting selected portions of the wavefront, an imaging device for capturing information related to the selected portions, and a processor for calculating aberrations of the wavefront from the captured information. The method comprises reflecting selected portions of a wavefront onto the imaging device, capturing information related to the selected portions, and processing the captured information to derive the aberrations.
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