发明授权
- 专利标题： Mode size converter for a planar waveguide
- 专利标题（中）： 平面波导的模式尺寸转换器
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申请号： US10101492申请日： 2002-03-16
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公开(公告)号： US06884327B2公开(公告)日： 2005-04-26
- 发明人: Tao Pan , Richard E. Demaray , Yu Chen , Yong Jin Xie , Rajiv Pethe
- 申请人： Tao Pan , Richard E. Demaray , Yu Chen , Yong Jin Xie , Rajiv Pethe
- 代理机构： Finnegan, Henderson, Farabow, Garrett & Dunner
- 主分类号： C23C14/04
- IPC分类号： C23C14/04 ; G02B6/12 ; G02B6/122 ; G02B6/132 ; C23C14/34
摘要：
A process for forming a mode size converter with an out-of-plane taper formed during deposition with a shadow mask is disclosed. Mode-size converters according to the present invention can have any number of configurations. Measured coupling efficiencies for waveguides with mode size converters according to the present invention show marked improvement.
公开/授权文献
- US20030173208A1 Mode size converter for a planar waveguide 公开/授权日：2003-09-18
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