- 专利标题： Carbon wire heating object sealing heater and fluid heating apparatus using the same heater
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申请号： US10395395申请日： 2003-03-25
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公开(公告)号： US06885814B2公开(公告)日： 2005-04-26
- 发明人: Takanori Saito , Hiroshi Mori , Akira Otsu , Norihiko Saito , Hiroyuki Honma , Eiichi Toya , Tomio Konn , Tomohiro Nagata , Ken Nakao , Kazutoshi Miura , Harunari Hasegawa , George Hoshi , Katsutoshi Ishi , Sunao Seko
- 申请人： Takanori Saito , Hiroshi Mori , Akira Otsu , Norihiko Saito , Hiroyuki Honma , Eiichi Toya , Tomio Konn , Tomohiro Nagata , Ken Nakao , Kazutoshi Miura , Harunari Hasegawa , George Hoshi , Katsutoshi Ishi , Sunao Seko
- 申请人地址： JP Tokyo JP Tokyo
- 专利权人： Toshiba Ceramics Co., Ltd.,Tokyo Electron Limited
- 当前专利权人： Toshiba Ceramics Co., Ltd.,Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo JP Tokyo
- 代理机构： Foley & Lardner LLP
- 优先权： JP2002-083078 20020325; JP2002-094543 20020329; JP2002-094544 20020329; JP2002-094546 20020329; JP2002-325380 20021108; JP2002-353842 20021205
- 主分类号： H01L23/34
- IPC分类号： H01L23/34 ; H05B3/14 ; H05B3/00
摘要：
A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.
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