Invention Grant
- Patent Title: Quartz glass body having improved resistance against plasma corrosion, and method for production thereof
- Patent Title (中): 具有改善的耐等离子体腐蚀性的石英玻璃体及其制造方法
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Application No.: US09935334Application Date: 2001-08-22
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Publication No.: US06887576B2Publication Date: 2005-05-03
- Inventor: Tatsuhiro Sato , Nobumasa Yoshida , Akira Fujinoki , Kyoichi Inaki , Tomoyuki Shirai
- Applicant: Tatsuhiro Sato , Nobumasa Yoshida , Akira Fujinoki , Kyoichi Inaki , Tomoyuki Shirai
- Applicant Address: DE Hanau JP Tokyo
- Assignee: Herseus Quarzglas GmbH & Co. KG,Shin-Etsu Quartz Products Co., Ltd.
- Current Assignee: Herseus Quarzglas GmbH & Co. KG,Shin-Etsu Quartz Products Co., Ltd.
- Current Assignee Address: DE Hanau JP Tokyo
- Agency: Tiajoloff & Kelly
- Priority: JP2000-252993 20000823; JP2000-390823 20001222; JP2000-395988 20001226
- Main IPC: C03B19/01
- IPC: C03B19/01 ; C03B19/06 ; C03B19/14 ; C03B32/00 ; C03C1/00 ; C03C3/06 ; C03C21/00 ; C03C23/00 ; C30B25/12 ; C30B31/14 ; B32B17/06 ; B32B9/00
Abstract:
An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gaseous plasma; and a method for producing the same. A body made of quartz glass containing a metallic element and having an improved resistance against plasma corrosion is provided that contains bubbles and crystalline phase at an amount expressed by projected area of less than 100 mm2 per 100 cm3.
Public/Granted literature
- US20020076559A1 Quartz glass body having improved resistance against plasma corrosion, and method for production thereof Public/Granted day:2002-06-20
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