发明授权
- 专利标题: Scheduling method and program for a substrate processing apparatus
- 专利标题(中): 基板处理装置的调度方法和程序
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申请号: US10141213申请日: 2002-05-07
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公开(公告)号: US06889105B2公开(公告)日: 2005-05-03
- 发明人: Nobuhiro Mukuta , Jun Kawai , Kiyoshi Akao , Osamu Horiguchi
- 申请人: Nobuhiro Mukuta , Jun Kawai , Kiyoshi Akao , Osamu Horiguchi
- 申请人地址: JP
- 专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人地址: JP
- 代理机构: Ostrolenk, Faber, Gerb & Soffen, LLP
- 优先权: JP2001-145968 20010516; JP2001-273223 20010910; JP2002-038006 20020215
- 主分类号: G05B19/418
- IPC分类号: G05B19/418 ; H01L21/00 ; G06F19/00
摘要:
A method of preparing a schedule for a substrate processing apparatus. A plurality of lots are processed by the substrate processing apparatus including a plurality of processing sections for processing substrates. An order of processing the lots is determined based on a recipe including a plurality of processing steps for successively processing the lots in the processing sections. The method includes, in determining the processing order, a step of allocating a first processing step for one of the lots, and thereafter allocating, as a next processing step, one of next processing steps for the lots preceded by a processing step having the earliest
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