发明授权
- 专利标题: Optical pressure sensor
- 专利标题(中): 光学压力传感器
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申请号: US10036629申请日: 2001-12-21
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公开(公告)号: US06894787B2公开(公告)日: 2005-05-17
- 发明人: Daniel W. Youngner , Son Thai Lu
- 申请人: Daniel W. Youngner , Son Thai Lu
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理商 Kris T. Fredrick
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G01B9/02
摘要:
A pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected.
公开/授权文献
- US20030117630A1 Optical pressure sensor 公开/授权日:2003-06-26
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