发明授权
- 专利标题： Large area substrate processing system
- 专利标题（中）： 大面积基板加工系统
-
申请号： US10243158申请日： 2002-09-12
-
公开(公告)号： US06896513B2公开(公告)日： 2005-05-24
- 发明人: Robert Z. Bachrach , Wendell T. Blonigan
- 申请人： Robert Z. Bachrach , Wendell T. Blonigan
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Moser, Patterson & Sheridan, LLP
- 主分类号： B65G49/06
- IPC分类号： B65G49/06 ; F27B13/00 ; F27D3/00 ; H01L21/00 ; H01L21/02 ; H01L21/677 ; H01L21/68
摘要：
A system and method for processing large area substrates is provided. In one embodiment, a processing system includes a transfer chamber having at least one processing chamber and a substrate staging system coupled thereto. The staging system includes a load lock chamber having a first port coupled to the transfer chamber and a heat treating station coupled to a second port of the load lock chamber. A load lock robot is disposed in the load lock chamber to facilitate transfer between the heat treating station and the load lock chamber.
公开/授权文献
- US20040053184A1 Large area substrate processing system 公开/授权日：2004-03-18
信息查询
IPC分类:
