发明授权
- 专利标题: Method and system for measuring stray light
- 专利标题(中): 杂散光测量方法和系统
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申请号: US10921164申请日: 2004-08-19
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公开(公告)号: US06900887B2公开(公告)日: 2005-05-31
- 发明人: Ho-chul Kim
- 申请人: Ho-chul Kim
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Lee, Sterba & Morse, P.C.
- 优先权: KR10-2003-0063357 20030909
- 主分类号: H01L21/027
- IPC分类号: H01L21/027 ; G03F7/20 ; G03F9/00 ; G01J1/42
摘要:
A method and system for measuring stray light for use in an exposure apparatus uses an image sensor to be disposed at a wafer level in the exposure apparatus. The stray light is measured by preparing a reference pattern and a measuring pattern on a reticle. The reference pattern includes a light shielding region having first open regions for transmitting light to a center of an active region of the image sensor. The measuring pattern includes a light shielding region having second open regions for transmitting light to a periphery of the active region. A first intensity of light reaching the active region after being filtered by the reference pattern and a second intensity of light reaching the image sensor after being filtered by the measuring pattern are measured. The intensity of the stray light is evaluated by a difference between the first and second light intensities.
公开/授权文献
- US20050052651A1 Method and system for measuring stray light 公开/授权日:2005-03-10