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US06901180B2 MEMS optical switch on a single chip and method 失效
MEMS光开关单芯片及方法

MEMS optical switch on a single chip and method
摘要:
The present invention provides for a 1×N optical switch having a switching component, an input, and a plurality of outputs formed in a single substrate. The switching component includes a pair of mirrors which are operated such that by changing the position of at least one of the mirrors, the output of the switch changes.
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