发明授权
- 专利标题: Data management method for mask writing
- 专利标题(中): 面具书写数据管理方法
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申请号: US09781128申请日: 2001-02-09
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公开(公告)号: US06901574B2公开(公告)日: 2005-05-31
- 发明人: Patrick J. LaCour , Emile Sahouria , Siqiong You
- 申请人: Patrick J. LaCour , Emile Sahouria , Siqiong You
- 代理机构: Christensen O'Connor Johnson Kindness PLLC
- 主分类号: G03F1/00
- IPC分类号: G03F1/00 ; H01L21/027 ; G06F17/50 ; G03C5/00 ; G03F9/00 ; G06F9/45 ; G06F9/455
摘要:
A method of translating device layout data to a format for a mask writing tool includes the acts of reading a file defining a number of cells that represent structures on the device. One or more cells are selected and one or more modified cells based on the interaction of the selected cells with other cells in the device layout are created. One or more additional cells is created that will create structures on the mask that are not formed by writing files corresponding to the modified cells and areas that prevent extraneous structures from being formed on the mask at a selected location by the writing of the files corresponding to the modified cells. A jobdeck for the mask writing tool is created that indicates where the files corresponding to modified cells and the one or more additional cells should be written to create one or more masks or reticles.
公开/授权文献
- US20020157068A1 Data management method for reticle/mask writing 公开/授权日:2002-10-24
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