发明授权
- 专利标题: Polysilicon feed-through fluid drop ejector
- 专利标题(中): 多晶硅直通液滴喷射器
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申请号: US10431540申请日: 2003-05-08
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公开(公告)号: US06905196B2公开(公告)日: 2005-06-14
- 发明人: Scott N. Seabridge , Alan D. Raisanen , Scott C. Warner , Thomas A. Tellier , Cathie J. Burke , William G. Hawkins
- 申请人: Scott N. Seabridge , Alan D. Raisanen , Scott C. Warner , Thomas A. Tellier , Cathie J. Burke , William G. Hawkins
- 申请人地址: US CT Stamford
- 专利权人: Xerox Corporation
- 当前专利权人: Xerox Corporation
- 当前专利权人地址: US CT Stamford
- 代理机构: Oliff & Berridge, PLC
- 主分类号: B41J2/14
- IPC分类号: B41J2/14 ; B41J2/05
摘要:
A fluid ejector includes a fluid channel having a resistive heater and terminating in a nozzle, a common bus formed transverse to the fluid channel and between the resistive heater and the nozzle, a connection line laterally adjacent to the fluid channel, and a connection structure for electrically connecting the common bus with the resistive heater and the connection line, the connection structure including a first set of one or more layers for electrical connection and a second set of one or more layers for covering the common bus and connection line. The first set of one or more layers includes a doped polysilicon layer on or overlaid by an optional tantalum-silicide layer. The second set of one or more layers includes a nitride layer on or overlaid by a tantalum layer.
公开/授权文献
- US20030210301A1 Polysilicon feed-through fluid drop ejector 公开/授权日:2003-11-13
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