发明授权
- 专利标题: Method and apparatus for modifying design constraints based on observed performance
- 专利标题(中): 基于观察性能修改设计约束的方法和装置
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申请号: US10425227申请日: 2003-05-02
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公开(公告)号: US06907369B1公开(公告)日: 2005-06-14
- 发明人: Richard J. Markle , Robert J. Chong , Alexander J. Pasadyn
- 申请人: Richard J. Markle , Robert J. Chong , Alexander J. Pasadyn
- 申请人地址: US TX Austin
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US TX Austin
- 代理机构: Williams, Morgan & Amerson
- 主分类号: G05B19/418
- IPC分类号: G05B19/418 ; G06F17/50 ; G06F19/00
摘要:
A method for modifying design constraints based on observed performance includes measuring a characteristic of a plurality of devices manufactured in a process flow. A design constraint associated with the characteristic is defined. A performance metric relating the performance of the devices as a function of the measured characteristic and the design constraint is generated. The design constraint is modified based on the performance metric. A manufacturing system includes a metrology tool and a design rule monitor. The metrology tool is configured to measure a characteristic of a plurality of devices manufactured in a process flow. The design rule monitor is configured to receive a design constraint associated with the characteristic, generate a performance metric relating the performance of the devices as a function of the measured characteristic and the design constraint, and modify the design constraint based on the performance metric.
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