Invention Grant
US06913981B2 Method of fabricating a bipolar transistor using selective epitaxially grown SiGe base layer 有权
使用选择性外延生长SiGe基层制造双极晶体管的方法

Method of fabricating a bipolar transistor using selective epitaxially grown SiGe base layer
Abstract:
Embodiments of a bipolar transistor are disclosed, along with methods for making the transistor. An exemplary transistor includes a collector region in a semiconductor substrate, a base layer overlying the collector region and bound by a field oxide layer, a dielectric isolation layer overlying the base layer, and an emitter structure overlying the dielectric isolation layer and contacting the base layer through a central aperture in the dielectric layer. The transistor may be a heterojunction bipolar transistor with the base layer formed of a selectively grown silicon germanium alloy. A dielectric spacer may be formed adjacent the emitter structure and over a portion of the base layer.
Information query
Patent Agency Ranking
0/0