发明授权
US06917073B2 ONO flash memory array for improving a disturbance between adjacent memory cells
有权
ONO闪存阵列,用于改善相邻存储单元之间的干扰
- 专利标题: ONO flash memory array for improving a disturbance between adjacent memory cells
- 专利标题(中): ONO闪存阵列,用于改善相邻存储单元之间的干扰
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申请号: US10643877申请日: 2003-08-20
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公开(公告)号: US06917073B2公开(公告)日: 2005-07-12
- 发明人: Mu-Yi Liu , Chih-Chieh Yeh , Tso-Hung Fan , Tao-Cheng Lu
- 申请人: Mu-Yi Liu , Chih-Chieh Yeh , Tso-Hung Fan , Tao-Cheng Lu
- 申请人地址: TW Hsinchu
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Rabin & Berdo, P.C.
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L29/792
摘要:
To reduce the disturbance between adjacent memory cells, an improved ONO flash memory array is implanted with a pocket on one side of the channel of each memory cell or two pockets of different concentrations on both sides of the channel, thereby resulting in memory cells with asymmetric pockets. Consequently, no disturbances occurred between adjacent memory cells when the ONO flash memory array is programmed or erased by band-to-band techniques, and the disturbances between adjacent memory cells are also suppressed during reading process.
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