发明授权
US06917462B2 Method and apparatus for translating a spatial light modulator to provide dithering 失效
用于平移空间光调制器以提供抖动的方法和装置

Method and apparatus for translating a spatial light modulator to provide dithering
摘要:
A method for translating a spatial light modulator (22) to provide dithering comprises the steps of: providing a support (11) have a high degree of flexibility; rigidly attaching an outer portion (14) of the support to a nonmoving base; attaching an inner web (12) of the support to the outer portion by means of flexible members (16); wherein the support, the outer portion, the inner web, and the flexible members are located in a first plane; wherein the flexible members allows motion of the inner web in only one dimension of the first plane; attaching a piezoelectric device (18) to a first end of the inner web; energizing the piezoelectric device to move the inner web in a positive direction in the one dimension; attaching a spring (20) to a second end of the inner web; and wherein the spring moves the inner web in a negative direction in the one dimension when the piezoelectric device is deactivated.
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