发明授权
- 专利标题: Device and method for separating and collecting halide gas
- 专利标题(中): 用于分离和收集卤化物气体的装置和方法
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申请号: US10466188申请日: 2002-01-23
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公开(公告)号: US06921428B2公开(公告)日: 2005-07-26
- 发明人: Osamu Yamamoto , Masayuki Kinouchi , Naoki Takada , Yoji Kase , Masao Kikuchi
- 申请人: Osamu Yamamoto , Masayuki Kinouchi , Naoki Takada , Yoji Kase , Masao Kikuchi
- 申请人地址: JP Yamaguchi
- 专利权人: Ube Industries, Ltd.
- 当前专利权人: Ube Industries, Ltd.
- 当前专利权人地址: JP Yamaguchi
- 代理机构: Young & Thompson
- 优先权: JP2001-016571 20010125; JP2001-393642 20011226; JP2002-010262 20020118
- 国际申请: PCT/JP02/00470 WO 20020123
- 国际公布: WO02/05882 WO 20020801
- 主分类号: B01D53/22
- IPC分类号: B01D53/22 ; B01D61/58 ; B01D71/02 ; B01D71/64 ; B01D69/08
摘要:
A halide gas separating and collecting device for separating and collecting halide gas from mixed gas containing the halide gas, wherein at least first and second stage separating membrane modules are stacked in multiple stages. The method comprises: feeding the mixed gas to the inlet of the first stage separating membrane module, feeding the gas passed through the previous separating membrane module to the inlets of the second and subsequent stage separating membrane modules, recycling the gas unpassed through the second and subsequent stage separating membrane modules to the inlet of the first stage separating membrane module, and controlling the flow of gas unpassed through the first stage separating membrane module by a control valve connected to the unpassed gas outlet of the first stage separating membrane module, whereby the halide gas can be separated and collected as unpassed gas at a high density and a high collection rate.