发明授权
US06921428B2 Device and method for separating and collecting halide gas 失效
用于分离和收集卤化物气体的装置和方法

Device and method for separating and collecting halide gas
摘要:
A halide gas separating and collecting device for separating and collecting halide gas from mixed gas containing the halide gas, wherein at least first and second stage separating membrane modules are stacked in multiple stages. The method comprises: feeding the mixed gas to the inlet of the first stage separating membrane module, feeding the gas passed through the previous separating membrane module to the inlets of the second and subsequent stage separating membrane modules, recycling the gas unpassed through the second and subsequent stage separating membrane modules to the inlet of the first stage separating membrane module, and controlling the flow of gas unpassed through the first stage separating membrane module by a control valve connected to the unpassed gas outlet of the first stage separating membrane module, whereby the halide gas can be separated and collected as unpassed gas at a high density and a high collection rate.
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