Invention Grant
- Patent Title: Three dimensional conical horn antenna coupled image detector and the manufacturing method thereof
- Patent Title (中): 三维锥形喇叭天线耦合图像检测器及其制造方法
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Application No.: US10460176Application Date: 2003-06-13
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Publication No.: US06924169B2Publication Date: 2005-08-02
- Inventor: Sung Moon , Kun Tae Kim
- Applicant: Sung Moon , Kun Tae Kim
- Applicant Address: KR Seoul
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR Seoul
- Agency: Greenblum & Bernstein, P.L.C.
- Main IPC: G01J1/04
- IPC: G01J1/04 ; G01J1/06 ; G01J1/42 ; G01J5/08 ; H01L21/00 ; H04N1/04

Abstract:
A manufacturing method for a three dimensional conical horn antenna coupled image detector includes depositing a sacrificial layer on the upper section of the substrate, and forming a pattern for the sacrificial layer is by performing a patterning process using the first etching mask. The method further includes depositing a first silicon nitride layer, forming a first silicon nitride layer, depositing a vanadium oxide layer, forming a vanadium oxide layer pattern, depositing a conductive layer, forming a conductive layer pattern, depositing a second silicon nitride layer, forming a second silicon nitride layer pattern, depositing a third silicon nitride layer, forming a side wall space pattern, and after the sacrificial layer is removed, performing an aligning process using a seventh etching mask.
Public/Granted literature
- US20040009622A1 Three dimensional conical horn antenna coupled image detector and the manufacturing method thereof Public/Granted day:2004-01-15
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