发明授权
- 专利标题: Confinement ring support assembly
- 专利标题(中): 限位环支撑组件
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申请号: US10418245申请日: 2003-04-16
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公开(公告)号: US06926803B2公开(公告)日: 2005-08-09
- 发明人: Jerrel K. Antolik
- 申请人: Jerrel K. Antolik
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: IP Strategy Group, P.C.
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H01L21/00 ; C23C16/00
摘要:
A confinement ring support assembly for coupling together a plurality of confinement rings in a plasma processing chamber. The confinement ring support assembly includes a post having first end and a second end. The post further includes a first lip having an associated first sliding surface, and a second lip having an associated second sliding surface. The first lip is disposed at a first position on the post, the second lip being disposed at a second position at a different arc relative to the first location on the post, the second position being disposed between the first position and the first end along a longitudinal axis of the post. The confinement ring support assembly further includes a first washer configured to move slidably from the first lip past the second lip toward the first end of the post. The first washer has a first cut formed in its interior opening that is configured to engage with the first lip to prevent the first washer from sliding past the first lip in a direction away from the first end and to engage with the first sliding surface associated with the first lip to constrain a rotational movement of the first washer as the washer moves longitudinally along the post.
公开/授权文献
- US20030196755A1 Confinement ring support assembly 公开/授权日:2003-10-23