发明授权
US06932516B2 Surface optical device apparatus, method of fabricating the same, and apparatus using the same 失效
表面光学器件装置及其制造方法以及使用其的装置

Surface optical device apparatus, method of fabricating the same, and apparatus using the same
摘要:
A surface optical device apparatus includes a surface optical device capable of emitting or receiving light through a surface thereof and a thick layer formed of a radiation-curable or electron-beam-curable material, such as a polymerizable resist. In the thick layer, a guide hole for inserting an end portion of a light-transmission member, such as an optical fiber, and a plastic optical fiber with a flat end face or a lens-shaped end face, therein is formed at a position corresponding to the surface of the surface optical device such that the surface optical device can be optically coupled to the light-transmission member inserted in the guide hole. The guide hole is formed in the thick layer by performing a patterning on the thick layer using photolithography to selectively harden the thick layer and developing the thick layer.
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