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US06933810B2 Surface acoustic wave device with lithium tantalate on a sapphire substrate and filter using the same 失效
在蓝宝石衬底上使用钽酸锂的表面声波器件和使用其的滤波器

Surface acoustic wave device with lithium tantalate on a sapphire substrate and filter using the same
摘要:
A surface acoustic wave device includes a piezoelectric substrate having a first surface on which comb-like electrodes are formed, and a second surface, and a support substrate joined to the second surface of the piezoelectric substrate. The piezoelectric substrate is made of lithium, tantalate, and the support substrate is made of sapphire. The following expressions being satisfied: T/t 10  (2) where T is a thickness of the piezoelectric substrate, t is a thickness of the support substrate, and λ is a wavelength of a surface acoustic filter, propagated along the first surface of the piezoelectric substrate.
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