发明授权
- 专利标题： Optical column for charged particle beam device
- 专利标题（中）： 用于带电粒子束装置的光学柱
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申请号： US10297864申请日： 2001-01-29
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公开(公告)号： US06936817B2公开(公告)日： 2005-08-30
- 发明人: Hans-Peter Feuerbaum
- 申请人： Hans-Peter Feuerbaum
- 申请人地址： DE Heimstetten
- 专利权人： ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- 当前专利权人： ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- 当前专利权人地址： DE Heimstetten
- 代理机构： Sughrue Mion, PLLC
- 优先权： EP00101987 20000201
- 国际申请： PCT/EP01/00931 WO 20010129
- 国际公布： WO01/57910 WO 20010809
- 主分类号： H01J37/18
- IPC分类号： H01J37/18 ; H01J37/256 ; H01J37/28 ; H01J27/00 ; H01J37/244 ; H01J37/317
摘要：
The invention provides a miniaturized optical column for a charged particle beam apparatus for examining a specimen (14). The column is constituted by, among other things, a charged particle source (2) for providing a beam of charged particles (10); a lens system for guiding the beam of charged particles (10) from the source (2) onto the specimen (14); and a housing (40) which, during operation, is set on beam boost potential.
公开/授权文献
- US20030155521A1 Optical column for charged particle beam device 公开/授权日：2003-08-21
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