发明授权
- 专利标题： Scanning probe microscope with improved probe tip mount
- 专利标题（中）： 扫描探针显微镜，带有改进的探针尖端安装
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申请号： US10748827申请日： 2003-12-29
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公开(公告)号： US06945100B2公开(公告)日： 2005-09-20
- 发明人: Joonhyung Kwon , Young Seok Kim , Sang-il Park
- 申请人： Joonhyung Kwon , Young Seok Kim , Sang-il Park
- 申请人地址： KR Sungnam
- 专利权人： PSIA Corporation
- 当前专利权人： PSIA Corporation
- 当前专利权人地址： KR Sungnam
- 代理机构： Silicon Valley Patent Group LLP
- 主分类号： G01B21/30
- IPC分类号： G01B21/30 ; G01Q10/02 ; G01Q10/04 ; G01Q20/02 ; G01Q30/00 ; G01Q60/32 ; G01Q60/38 ; G01Q70/02 ; G01Q70/10 ; H01J37/26 ; G01N13/16 ; G01B5/28
摘要：
A mounting mechanism for the probe tip of a Scanning Probe Microscope (SPM) includes a scanner supported by a stationary frame, and a kinematic mechanism supported by the scanner. The kinematic mechanism includes at least three protrusions and at least one magnet. The mounting mechanism for the probe tip also includes a chip mount having a hole, a slot and a flat surface. The chip mount, on being held by the magnet, provides an easy way to mount the probe tip without requiring any tools.
公开/授权文献
- US20040140424A1 Scanning probe microscope with improved probe tip mount 公开/授权日：2004-07-22
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