Invention Grant
- Patent Title: Micromirror actuator
- Patent Title (中): 微镜执行器
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Application No.: US10015953Application Date: 2001-12-17
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Publication No.: US06947197B2Publication Date: 2005-09-20
- Inventor: Yong-seop Yoon , Young-hoon Min , Ki-deok Bae
- Applicant: Yong-seop Yoon , Young-hoon Min , Ki-deok Bae
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Sughrue Mion, PLLC
- Priority: KR2001-25984 20010512
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B6/35 ; G02B26/00

Abstract:
A micromirror actuator having a micromirror, which is operative using an electrostatic force with a low voltage and wherein an electrostatic force opposite to the driving force of the micromirror is blocked, and a method for manufacturing the same, are provided. The micromirror actuator includes a substrate, a trench in which at least one electrode is formed, supporting posts installed at opposite sides of the trench, a torsion bar supported by the supporting posts, and the micromirror including a driving unit which faces the trench when the micromirror is in a horizontal state, and a reflecting unit, which is elastically rotated about the torsion bar, to reflect an optical signal. The actuator also includes a shielding electrode installed to face the reflecting unit when the micromirror is in a horizontal state and to block an electrostatic force occurring between the reflecting unit and the electrode.
Public/Granted literature
- US20040246558A1 Micromirror actuator Public/Granted day:2004-12-09
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