发明授权
- 专利标题: MEMS optical latching switch
- 专利标题(中): MEMS光锁定开关
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申请号: US10712203申请日: 2003-11-12
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公开(公告)号: US06947624B2公开(公告)日: 2005-09-20
- 发明人: Joel A. Kubby , Kathleen A. Feinberg , Kristine A. German , Peter M. Gulvin , Jun Ma , Pinyen Lin
- 申请人: Joel A. Kubby , Kathleen A. Feinberg , Kristine A. German , Peter M. Gulvin , Jun Ma , Pinyen Lin
- 申请人地址: US CT Stamford
- 专利权人: Xerox Corporation
- 当前专利权人: Xerox Corporation
- 当前专利权人地址: US CT Stamford
- 代理机构: Oliff & Berridge, PLC
- 主分类号: G02B6/12
- IPC分类号: G02B6/12 ; G02B6/35 ; G02B6/26 ; G02B6/42
摘要:
An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a cantilever beam platform for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.
公开/授权文献
- US20040184710A1 MEMS optical latching switch 公开/授权日:2004-09-23