Invention Grant
- Patent Title: Multiple hinge MEMS device
- Patent Title (中): 多重铰链MEMS器件
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Application No.: US10346506Application Date: 2003-01-15
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Publication No.: US06950223B2Publication Date: 2005-09-27
- Inventor: Andrew G. Huibers , Satyadev R. Patel
- Applicant: Andrew G. Huibers , Satyadev R. Patel
- Applicant Address: US CA Sunnyvale
- Assignee: Reflectivity, Inc
- Current Assignee: Reflectivity, Inc
- Current Assignee Address: US CA Sunnyvale
- Agent Gregory R. Muir
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/00 ; G02B5/08 ; H01L29/84

Abstract:
A MEMS device is disclosed comprising: a substrate; a movable micromechanical element movable relative to the substrate; a connector and a hinge for allowing movement of the micromechanical element, wherein the connector is made of a material different than the hinge. In another embodiment of the invention, the connector has a conductivity greater than the hinge. In a further embodiment of the invention, the hinge provides at least 90% of the restoring force to the MEMS device, and the connector provides 10% or less of the restoring force. In a further embodiment of the invention, the connector and the hinge have different spring constants. In a still further embodiment of the invention, the connector experiences a lower strain at maximum deflection of the micromechanical element than the hinge.
Public/Granted literature
- US20040233505A1 Multiple hinge MEMS device Public/Granted day:2004-11-25
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