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US06952266B2 Interferometer alignment 失效
干涉仪校准

Interferometer alignment
摘要:
The present invention provides means for correcting interferometer alignment errors through the use of corrective elements. The corrective elements allow reduced accuracy in the assembly process. Residual alignment errors caused by imprecise mounting of permanently mounted components can be corrected using relatively low precision positioning of corrector components. The technique can be particularly applicable to the mass production of interferometers, for which achieving and maintaining the required assembly tolerances might otherwise be prohibitively expensive. Interferometers according to the present invention can be used, for example, in optical spectroscopy and in interferometers.
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