Invention Grant
- Patent Title: Hinge structures for micro-mirror arrays
- Patent Title (中): 微镜阵列的铰链结构
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Application No.: US10365951Application Date: 2003-02-12
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Publication No.: US06952302B2Publication Date: 2005-10-04
- Inventor: Jonathan C. Doan , Satyadev R. Patel , Robert M. Duboc, Jr.
- Applicant: Jonathan C. Doan , Satyadev R. Patel , Robert M. Duboc, Jr.
- Applicant Address: US CA Sunnyvale
- Assignee: Reflectivity, Inc
- Current Assignee: Reflectivity, Inc
- Current Assignee Address: US CA Sunnyvale
- Agent Gregory R. Muir
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/08 ; G02F26/00
Abstract:
A method and spatial light modulator are provided herein. The spatial light modulator has a higher resolution and an increased fill factor. The spatial light modulator also provides an increased contrast ratio. Furthermore, the spatial light modulator of the present invention can be operated in the absence of polarized light and that has improved electro-mechanical performance and robustness with respect to manufacturing. A method and its alternative are disclosed herein by the present invention for manufacturing the spatial light modulator.
Public/Granted literature
- US20040156089A1 Hinge structures for micro-mirror arrays Public/Granted day:2004-08-12
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