发明授权
US06962516B2 Voltage applying apparatus, and apparatus and method for manufacturing electron source
失效
电压施加装置，以及用于制造电子源的装置和方法
- 专利标题： Voltage applying apparatus, and apparatus and method for manufacturing electron source
- 专利标题（中）： 电压施加装置，以及用于制造电子源的装置和方法
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申请号： US10236983申请日： 2002-09-09
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公开(公告)号： US06962516B2公开(公告)日： 2005-11-08
- 发明人: Kazuhiro Ohki , Shigeto Kamata , Akihiro Kimura
- 申请人： Kazuhiro Ohki , Shigeto Kamata , Akihiro Kimura
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2001-281636 20010917
- 主分类号： H01J9/44
- IPC分类号： H01J9/44 ; H01J9/02 ; H01J9/39 ; H01J9/00 ; H01J9/42
摘要：
A voltage applying apparatus including a holder, a probe and the like as voltage applying means enabling the application of a voltage to electrode wiring connected with electric conductors formed on a substrate on which the electrode wiring is formed. The apparatus is equipped with aligning means making the position of the probe follow to the changes of the position of the electrode wiring to coincide with them. The aligning means makes the position of the probe follow the position of the electrode wiring so that the probe aligns the electrode wiring by the thermal expansion of the holder.
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