Invention Grant
- Patent Title: Packaged microelectromechanical device with lubricant
- Patent Title (中): 带有润滑剂的封装的微机电装置
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Application No.: US10811449Application Date: 2004-03-26
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Publication No.: US06979893B2Publication Date: 2005-12-27
- Inventor: Jim Dunphy , Dmitri Simonian , John Porter
- Applicant: Jim Dunphy , Dmitri Simonian , John Porter
- Applicant Address: US CA Sunnyvale
- Assignee: Reflectivity, Inc
- Current Assignee: Reflectivity, Inc
- Current Assignee Address: US CA Sunnyvale
- Agent Gregory R. Muir
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H01L23/20 ; H01L23/34
Abstract:
The present invention provides a lubricant container inside a microelectromechanical device package. The lubricant container contains selected lubricant that evaporates from the container and contact to a surface of the microelectromechanical device for lubricating the surface.
Public/Granted literature
- US20050214970A1 Method and apparatus for lubricating microelectromechanical devices in packages Public/Granted day:2005-09-29
Information query
