发明授权
US06980303B2 Light-emitting/receiving combined unit and displacement sensors using the same
有权
发光/接收组合单元和使用其的位移传感器
- 专利标题: Light-emitting/receiving combined unit and displacement sensors using the same
- 专利标题(中): 发光/接收组合单元和使用其的位移传感器
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申请号: US10240417申请日: 2002-02-01
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公开(公告)号: US06980303B2公开(公告)日: 2005-12-27
- 发明人: Hidehiro Kume , Akihito Nakayama , Kayoko Taniguchi , Akihiro Kuroda
- 申请人: Hidehiro Kume , Akihito Nakayama , Kayoko Taniguchi , Akihiro Kuroda
- 申请人地址: JP JP
- 专利权人: Sony Corporation,Sony Precision Technology Inc.
- 当前专利权人: Sony Corporation,Sony Precision Technology Inc.
- 当前专利权人地址: JP JP
- 代理机构: Rader, Fishman & Grauer, PLLC
- 代理商 Ronald P. Kananen
- 优先权: JP2001-026743 20010202
- 国际申请: PCT/JP02/00841 WO 20020201
- 国际公布: WO02/063246 WO 20020815
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01D5/38 ; G01B11/14
摘要:
The present invention provides a light emitting/receiving composite unit (1) for emitting and receiving lights, which includes a light source (3), an optical splitting unit (4) for splitting returning lights to the composite unit (1) into a plurality of lights, a polarizing unit (5) for increasing and decreasing quantity of lights transmitted therefrom corresponding to polarization state of the returning lights, and an optical receiving unit (6) which has a plurality of photo-detecting elements (6—1 to 6—4) for detecting the lights transmitted through the polarizing unit (5), which are unitedly integrated into one unit. Also, the present invention provides a displacement detection apparatus of grating interference type, which includes thus unitedly integrated composite unit (1), and an external optical system of an objective unit having a reflection type diffraction grating RG, a reflecting unit (R1a, R1b) for reflecting lights from the composite unit (1) to the reflection type diffraction grating RG, a polarizing unit (WP1a, WP1b) for changing polarization state of diffracted lights from the reflection type diffraction grating RG, and a reflecting unit (R2a, R2b) for reflecting lights transmitted through the polarizing unit (WP1a, WP1b) to cause the reflected lights go backward.