Electron beam recorder and method thereof
摘要:
Pits are exposed and formed on a resist master disc by an electron beam recorder. A leading end and a trailing end of each pit are substantially the same form. The electron beam recorder includes: an electron beam source that discharges electron beams; a voltage controller that generates voltages based on a predetermined information signals; control electrodes that deflect the electron beams based on the voltages; a shield plate having a passing position to pass the electron beams and a shielding position to shield the electron beams; and a turntable that carries and rotates the disc. The voltage controller controls the voltages applied to the control electrodes to substantially equalize a first velocity of the electron beams to travel from a first shielding position to the passing position with a second velocity of the electron beams to travel from the passing position to a second shielding position.
公开/授权文献
信息查询
0/0