发明授权
- 专利标题: Dual salicide process for optimum performance
- 专利标题(中): 双重自杀过程,以获得最佳性能
-
申请号: US10643341申请日: 2003-08-19
-
公开(公告)号: US06987061B2公开(公告)日: 2006-01-17
- 发明人: Manoj Mehrotra
- 申请人: Manoj Mehrotra
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 代理商 Jacqueline J. Garner; W. James Brady, III; Frederick J. Telecky, Jr.
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238 ; H01L21/44
摘要:
The present invention pertains to forming respective silicides on multiple transistors in a single process. High performance is facilitated with simple and highly integrated process flows. As such, transistors, and an integrated circuit containing the transistors, can be fabricated efficiently and at a low cost. The different silicides can be formed with different materials and/or to different thicknesses. As such, the silicides can have different electrical characteristics, such as resistivity and conductivity. These different attributes instill the transistors with different work functions when formed as gate contacts thereon. This provides an integrated circuit containing the transistors with diverse operating capabilities allowing for the execution of operations requiring more flexibility and/or functionality.
公开/授权文献
- US20050042831A1 Dual salicide process for optimum performance 公开/授权日:2005-02-24
信息查询
IPC分类: