Invention Grant
- Patent Title: Method for fabricating semiconductor optical device
- Patent Title (中): 制造半导体光学器件的方法
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Application No.: US10800680Application Date: 2004-03-16
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Publication No.: US06989312B2Publication Date: 2006-01-24
- Inventor: Hyun Woo Song , Won Seok Han , Jong Hee Kim , Young Gu Ju , O Kyun Kwon , Sang Hee Park
- Applicant: Hyun Woo Song , Won Seok Han , Jong Hee Kim , Young Gu Ju , O Kyun Kwon , Sang Hee Park
- Applicant Address: KR Daejon-Shi
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejon-Shi
- Agency: Mayer, Brown, Rowe & Maw LLP
- Priority: KR10-2003-0085359 20031128
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
Provided is a method for fabricating a semiconductor optical device that can be used as a reflecting semiconductor mirror or an optical filter, in which two or more types of semiconductor layers having different etch rates are alternately stacked, at least one type of semiconductor layers is selectively etched to form an air-gap structure, and an oxide or a nitride having a good heat transfer property is deposited so that the air gap is buried, whereby it is possible to effectively implement the semiconductor reflector or the optical filter having a high reflectance in a small period because of the large index contrast between the oxide or the nitride buried in the air gap and the semiconductor layer.
Public/Granted literature
- US20050118741A1 Method for fabricating semiconductor optical device Public/Granted day:2005-06-02
Information query
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