发明授权
- 专利标题: Alignment-tolerant lens structures for acoustic force actuation of cantilevers
- 专利标题(中): 用于悬臂的声力驱动的对准容差透镜结构
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申请号: US10323384申请日: 2002-12-18
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公开(公告)号: US06990853B2公开(公告)日: 2006-01-31
- 发明人: Scott A. Elrod
- 申请人: Scott A. Elrod
- 申请人地址: US CA Palo Alto
- 专利权人: Palo Alto Research Center Incorporated
- 当前专利权人: Palo Alto Research Center Incorporated
- 当前专利权人地址: US CA Palo Alto
- 代理机构: Fay, Sharpe, Fagan, Minnich & McKee, LLP
- 主分类号: G01B11/30
- IPC分类号: G01B11/30
摘要:
In accordance with one aspect of the present invention, a cantilever of a probe-based instrument is deflected by directing a beam of ultrasonic acoustic energy at the cantilever to apply acoustic radiation pressure to the cantilever. The energy is generated by an acoustic actuator. The transmitted beam preferably is focused using a cylindrical lens, providing a beam tightly focused in one dimension and unfocused in a second dimension. In accordance with another aspect of the present invention, a power source such as an RF signal generator is operated so as to spread the spectrum of acoustic radiation on a time scale that is short or comparable to the acoustic roundtrip time. Such a design diminishing the resonance effects and sensitivity to spacing between the cantilever and the acoustic source.
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