发明授权
US06990867B2 Force detection device 失效
力检测装置

Force detection device
摘要:
Forces and moments are detected in a distinguished manner by a simple structure. An outer box-like structure formed of a metal is set on top of an insulating substrate and an insulating inner box-like structure is contained in the interior. Five electrodes E1 to E5 are positioned on a top plate of the inner box-like structure. Four electrodes E6 to E9 are positioned on the four side surfaces of the inner box-like structure. Capacitance elements C1 to C5 are arranged by electrodes E1 to E5 and a top plate of the outer box-like structure and capacitance elements C6 to C9 are arranged by electrodes E6 to E9 and side plates of the outer box-like structure. A force Fx in the X-axis direction is detected by means of the capacitance difference between C6 and C7, a force Fy in the Y-axis direction is detected by means of the capacitance difference between C8 and C9, a force Fz in the Z-axis direction is detected by means of the capacitance of C5, a moment My about the Y-axis is detected by means of the capacitance difference between C1 and C2, and a moment Mx about the X-axis is detected by means of the capacitance difference between C3 and C4.
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