发明授权
- 专利标题: Force detection device
- 专利标题(中): 力检测装置
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申请号: US10799381申请日: 2004-03-12
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公开(公告)号: US06990867B2公开(公告)日: 2006-01-31
- 发明人: Kazuhiro Okada
- 申请人: Kazuhiro Okada
- 申请人地址: JP Ageo
- 专利权人: Wacoh Corporation
- 当前专利权人: Wacoh Corporation
- 当前专利权人地址: JP Ageo
- 代理机构: Ladas & Parry LLP
- 优先权: JP2003-096168 20030331
- 主分类号: G01B7/16
- IPC分类号: G01B7/16 ; G01L1/00
摘要:
Forces and moments are detected in a distinguished manner by a simple structure. An outer box-like structure formed of a metal is set on top of an insulating substrate and an insulating inner box-like structure is contained in the interior. Five electrodes E1 to E5 are positioned on a top plate of the inner box-like structure. Four electrodes E6 to E9 are positioned on the four side surfaces of the inner box-like structure. Capacitance elements C1 to C5 are arranged by electrodes E1 to E5 and a top plate of the outer box-like structure and capacitance elements C6 to C9 are arranged by electrodes E6 to E9 and side plates of the outer box-like structure. A force Fx in the X-axis direction is detected by means of the capacitance difference between C6 and C7, a force Fy in the Y-axis direction is detected by means of the capacitance difference between C8 and C9, a force Fz in the Z-axis direction is detected by means of the capacitance of C5, a moment My about the Y-axis is detected by means of the capacitance difference between C1 and C2, and a moment Mx about the X-axis is detected by means of the capacitance difference between C3 and C4.
公开/授权文献
- US20040187593A1 Force detection device 公开/授权日:2004-09-30
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