发明授权
- 专利标题: Method of manufacturing a probe array
- 专利标题(中): 探针阵列的制造方法
-
申请号: US10720444申请日: 2003-11-25
-
公开(公告)号: US06993826B2公开(公告)日: 2006-02-07
- 发明人: Junichi Takahashi , Motonobu Kourogi , Takashi Yatsui , Motoichi Ohtsu
- 申请人: Junichi Takahashi , Motonobu Kourogi , Takashi Yatsui , Motoichi Ohtsu
- 申请人地址: JP Tokyo JP Kanagawa-ken
- 专利权人: Ricoh Company, Ltd.,Kanagawa Academy of Science and Technology
- 当前专利权人: Ricoh Company, Ltd.,Kanagawa Academy of Science and Technology
- 当前专利权人地址: JP Tokyo JP Kanagawa-ken
- 代理机构: Dickstein Shapiro Morin & Oshinsky LLP
- 优先权: JP11-157699 19990604; JP11-204244 19990719; JP11-326169 19991116; JP2000-115825 20000411; JP2000-125127 20000426
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H04R31/00
摘要:
An optical-pickup slider is characterized in that a light-transmitting-property substrate is bonded to a surface of a layer having a tapered through hole, on which surface a larger opening of the tapered through hole exists. Thereby, it is possible to prevent the layer having an aperture from being destroyed. A method of manufacturing the optical-pickup slider comprises the steps of a) making a tapered through hole in a layer layered on a first substrate and having a thickness smaller than that of the first substrate; and, after bonding a light-transmitting-property substrate to a surface of the layer, removing the first substrate so as to expose an aperture at a tip of the tapered through hole.
公开/授权文献
信息查询
IPC分类: